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MEMS and Microsystems: Design, Manufacture, and Nanoscale Engineering, by Tai-Ran Hsu
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Technology/Engineering/Mechanical
A bestselling MEMS text...now better than ever.
An engineering design approach to Microelectromechanical Systems, MEMS and Microsystems remains the only available text to cover both the electrical and the mechanical aspects of the technology. In the five years since the publication of the first edition, there have been significant changes in the science and technology of miniaturization, including microsystems technology and nanotechnology. In response to the increasing needs of engineers to acquire basic knowledge and experience in these areas, this popular text has been carefully updated, including an entirely new section on the introduction of nanoscale engineering.
Following a brief introduction to the history and evolution of nanotechnology, the author covers the fundamentals in the engineering design of nanostructures, including fabrication techniques for producing nanoproducts, engineering design principles in molecular dynamics, and fluid flows and heat transmission in nanoscale substances.
Other highlights of the Second Edition include:
*
Expanded coverage of microfabrication plus assembly and packaging technologies
*
The introduction of microgyroscopes, miniature microphones, and heat pipes
*
Design methodologies for thermally actuated multilayered device components
*
The use of popular SU-8 polymer material
Supported by numerous examples, case studies, and applied problems to facilitate understanding and real-world application, the Second Edition will be of significant value for both professionals and senior-level mechanical or electrical engineering students.
- Sales Rank: #789830 in Books
- Published on: 2008-03-17
- Original language: English
- Number of items: 1
- Dimensions: 9.50" h x 1.35" w x 7.80" l, 2.44 pounds
- Binding: Hardcover
- 576 pages
From the Back Cover
Technology/Engineering/Mechanical
A bestselling MEMS text...now better than ever.
An engineering design approach to Microelectromechanical Systems, MEMS and Microsystems remains the only available text to cover both the electrical and the mechanical aspects of the technology. In the five years since the publication of the first edition, there have been significant changes in the science and technology of miniaturization, including microsystems technology and nanotechnology. In response to the increasing needs of engineers to acquire basic knowledge and experience in these areas, this popular text has been carefully updated, including an entirely new section on the introduction of nanoscale engineering.
Following a brief introduction to the history and evolution of nanotechnology, the author covers the fundamentals in the engineering design of nanostructures, including fabrication techniques for producing nanoproducts, engineering design principles in molecular dynamics, and fluid flows and heat transmission in nanoscale substances.
Other highlights of the Second Edition include:
-
Expanded coverage of microfabrication plus assembly and packaging technologies
-
The introduction of microgyroscopes, miniature microphones, and heat pipes
-
Design methodologies for thermally actuated multilayered device components
-
The use of popular SU-8 polymer material
Supported by numerous examples, case studies, and applied problems to facilitate understanding and real-world application, the Second Edition will be of significant value for both professionals and senior-level mechanical or electrical engineering students.
About the Author
Tai-Ran Hsu, PhD, is a Professor in the Department of Mechanical and Aerospace Engineering, San Jose State University, California. Dr. Hsu is the author of the earlier edition of this book, which is considered one of the bestselling textbooks on the subject of MEMS.
Most helpful customer reviews
0 of 0 people found the following review helpful.
This is an excellent resource for MEMS background information
By Michael A. Duvernois
New in this edition are micro-fabricated gyroscopes and microphone elements, the latter of which is already appearing in consumer devices. The second edition updates modernize what was already an excellent book.
I'd recommend that if you're not sure about spending the money on the book that you use amazon's search inside this book and take a bit of a look. Much as you'd do in a bookstore, thumb through, search for a couple of items of interest, that sort of thing.
0 of 0 people found the following review helpful.
Five Stars
By Yu Ye
nice book.
0 of 0 people found the following review helpful.
Five Stars
By li
Good
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